UVB-100

Ideal for large O-ring sealed vacuum systems and load locks, the UVB-100 is designed to desorb water vapor and remove oxidative hydrocarbon in high and ultra-high vacuum chambers, the UVB-100 Water Desorption System utilizes UV radiation to desorb layers of water vapor without the intense heat of IR or a radiant bakeout. For surface analysis systems, using a UVB-100 means that you can load samples more quickly and without introducing water vapor into your system. For high vacuum systems, faster pump-down times mean more process runs and higher productivity. In production systems, the UVB-100 provides faster ultimate pressure and quicker removal of desorbed water during pump down. There are various packages available, along with optional accessories, please contact us here for more information.

Key features

Low-temperature water desorption
Easy to use
Ideal for large chambers and load locks with O-ring seals
Works with most HV and UHV systems

Theory of Operation

Layers of water vapor molecules on the inside of vacuum chambers can be desorbed by energising them with ultra-violet radiation in the range of 190 to 200nm, which provides sufficient energy to break covalent bonds. The graphs ( shown in the gallery) show the effect of UV energy on water, hydrogen, oxygen and CO2. In this case, the UV emitter was activated for 8 minutes and then turned off. You can see from the graphs that the water vapor desorption rate increased during the UV ON time and then dropped off significantly when the UV was turned OFF. The second graph shows an increase in H and a significant increase in CO2 as well as a reduction in oxygen during the UV ON time and a corresponding decrease in CO2 and H when the UV was turned OFF. The CO2 will vary with the amount of hydrocarbon available for reaction with O free radicals and O3. Download application notes: application 1. UVB-100 is developed by RBD Instruments. We are the sole European distributor representing RBD Instruments.

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